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Research Highlights

The darker regions are the As ion implanted electrods in the 2-terminal device template. The interdigitated fingers are connected to two common contact pads on the top and bottom of a device template. The gap between each pair of the electrodes is 0.75 micron. The As implanted region appears lower in this AFM image after HF etch.

[J. V. Sci. Technol.B 22, 3182-3185 (2004).]

 

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T.-C. Shen