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Nanolithography Publications

(1) T. C. Shen, R. T. Brockenbrough, J. R. Tucker, and J. W. Lyding, "Ion irradiation effects on graphite with scanning tunneling microscope", J. Vac. Sci. Technol. B 9, 1376 (1991) .

(2) J. W. Lyding, T. C. Shen, J. S. Hubacek, J. R. Tucker, and G. C. Abeln "Nanoscale patterning and oxidation of H-passivated Si(100)-2x1 surfaces with an ultrahigh vacuum scanning tunneling microscope", Appl. Phys. Lett. 64, 2010 (1994).

(3) J. W. Lyding, G. C. Abeln, T.-C. Shen, C. Wang and J. R. Tucker, "Nanometer scale patterning and oxidation of silicon surfaces with an ultrahigh vacuum scanning tunneling microscope", J. Vac. Sci. Technol. B 12, 3735 (1994).

(4) J. R. Tucker, C. Wang, J. W. Lyding, T.-C. Shen, and G. C. Abeln, "Nanometer scale MOSFETs and STM patterning on Si", in Extended Abstracts of the 1994 International Conference on Solid State Devices and Materials, Yokohama, 322, (1994).

(5) J. W. Lyding, T.-C. Shen, G. C. Abeln, C. Wang, E. T. Foley, and J. R. Tucker, "Silicon nanofabrication and chemical modification by UHV-STM", Mat. Res. Soc. Symp. Proc. 380, 187 (1995).

(6) G. C. Abeln, T.-C. Shen, J. R. Tucker, and J. W. Lyding, "Nanoscale STM-patterning and chemical modification of the Si(100) surface", Micro. Eng. 27, 23 (1995).

(7) J. W. Lyding, T.-C. Shen, G. C. Abeln, C. Wang, and J. R. Tucker, "Nanoscale patterning and selective chemistry of silicon surfaces by ultrahigh-vacuum scanning tunneling microscopy", Nanotechnology 7, 128 (1996).

(8) J. W. Lyding, T.-C. Shen, G. C. Abeln, C. Wang, P. A. Scott, J. R. Tucker, P. Avouris, and R. E. Walkup, "Ultrahigh vacuum scanning tunneling microscope-based nanolithography and selective chemistry on silicon surfaces", Israel J. of Chem. 36, 3 (1996).

(9) T.-C. Shen, "Nanofabrication on Silicon Surfaces by STM", in Chemistry and Physics of Small Structures, 2, 1997 OSA Technical Digest Series, pp.56-58.